EUV

EUV Simulation

Description

Simulation of light scattering off 2D EUV photolithographic masks.

Further information is available in the detailed project description.

 
Members

Sven Burger
Roland Klose
Achim Schädle
Frank Schmidt
Lin Zschiedrich

Responsible

Frank Schmidt

Partners  

• Infineon Technologies AG
• JCMwave GmbH

 
Funding

Infineon Technologies AG
JCMwave GmbH

Duration

01/2005 - 02/2005