Farchmin, Nando
Position:
Guest
Room:
2022
Department:
Research group:
Mail:
farchmin
zib.de
zib.dePublications
2020
2019
2020 |
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| Nando Farchmin, Martin Hammerschmidt, Philipp-Immanuel Schneider, Matthias Wurm, Bernd Bodermann, Markus Bär, Sebastian Heidenreich | Efficient Bayesian inversion for shape reconstruction of lithography masks | J. Micro/Nanolith. MEMS MOEMS, Vol.19, p. 024001, 2020 |
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DOI |
2019 |
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| Nando Farchmin, Martin Hammerschmidt, Philipp-Immanuel Schneider, Matthias Wurm, Markus Bär, Sebastian Heidenreich | Efficient global sensitivity analysis for silicon line gratings using polynomial chaos | Proc. SPIE, Vol.11057, p. 110570J, 2019 |
BibTeX
DOI |