Light-matter interplay for optical metrology beyond the classical spatial resolution limits

The EU aims at holding a dominant global position in nanotechnology, micro-nanoelectronics, photonics and advanced materials: four of the six Key Enabling Technologies (KET) identified by the European Commission. Such dominnat position strongly depends on the availability of proper tools that can serve the metrology needs of those KETs in terms of speed, non-invasiveness, reliability and integrability. This project is a part of the collaborative Joint Research Project (JRP) BeCOMe. This JRP explores novel metrology paradigms exploiting light-matter interplay, the topological information encoded in optical fields and the most recent accomplishments in the areas of quantum optics and inverse problems to achieve disruptive advances in optical metrology.

Partners:

VSL B.V. (NL)
Cesky Metrologicky Institut (CZ)
Dansk Fundamental Metrologi A/S (DK)
Istituto Nazionale di Ricerca Metrologica (IT)
National Physics Laboratory (UK)
Physikalisch-Technische Bundesanstalt (DE)
Aalto-korkeakoulusäätiö sr (FI)
Friedrich-Schiller-Universität Jena (DE)
Fundacio Institut de Ciencies Fotoniques (ES)
Technische Universität Braunschweig (DE)
Technische Universiteit Delft (NL)
Università degli Studi di Torino (IT)
Swansea University (UK)
Zuse Institute Berlin (DE)
Danmarks Tekniske Universitet (DK)

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Publications

2023 2020 2019 2018

2023
Deshabrato Mukherjee, Benjámin Kalas, Sven Burger, György Sáfrán, Miklós Serényi, Miklós Fried, Péter Petrik	Nanostructures for in-situ surface-enhanced Kretschmann-Raether ellipsometry	Proc. SPIE, p. 124280S, Vol.12428, 2023	BibTeX DOI arXiv
2020
Thomas Siefke, Carol Hurtado, Johannes Dickmann, Walter Dickmann, Tim Käseberg, Jan Meyer, Sven Burger, Uwe Zeitner, Bernd Bodermann, Stefanie Kroker	Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers	Opt. Express, Vol.28, p. 23122, 2020	BibTeX DOI
Felix Binkowski, Fridtjof Betz, Rémi Colom, Martin Hammerschmidt, Lin Zschiedrich, Sven Burger	Quasinormal mode expansion of optical far-field quantities	Phys. Rev. B, Vol.102, p. 035432, 2020	BibTeX arXiv DOI
2019
Felix Binkowski, Lin Zschiedrich, Sven Burger	An auxiliary field approach for computing optical resonances in dispersive media	J. Eur. Opt. Soc.-Rapid, Vol.15, p. 3, 2019	BibTeX DOI
Philipp-Immanuel Schneider, Xavier Garcia Santiago, Victor Soltwisch, Martin Hammerschmidt, Sven Burger, Carsten Rockstuhl	Benchmarking five global optimization approaches for nano-optical shape optimization and parameter reconstruction	ACS Photonics, Vol.6, p. 2726, 2019	BibTeX DOI arXiv
Sven Burger, Felix Binkowski, Lin Zschiedrich	Computing resonances in nano-photonic devices using Riesz-projection-based methods	The 10th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META 2019), Said Zhoudi, Antonio Topa (Eds.), p. 92, 2019	BibTeX
Jon Wilson, Philipp Gutsche, Sven Herrmann, Sven Burger, Kevin McPeak	Correlation of circular differential optical absorption with geometric chirality in plasmonic meta-atoms	Opt. Express, Vol.27, p. 5097, 2019	BibTeX DOI
Xavier Garcia Santiago, Martin Hammerschmidt, Sven Burger, Carsten Rockstuhl, Ivan Fernandez-Corbaton, Lin Zschiedrich	Decomposition of scattered electromagnetic fields into vector spherical wave functions on surfaces with general shapes	Phys. Rev. B, Vol.99, p. 045406, 2019	BibTeX DOI arXiv
Nando Farchmin, Martin Hammerschmidt, Philipp-Immanuel Schneider, Matthias Wurm, Markus Bär, Sebastian Heidenreich	Efficient global sensitivity analysis for silicon line gratings using polynomial chaos	Proc. SPIE, Vol.11057, p. 110570J, 2019	BibTeX DOI
Anna Andrle, Philipp Hönicke, Philipp-Immanuel Schneider, Yves Kayser, Martin Hammerschmidt, Sven Burger, Frank Scholze, Burkhard Beckhoff, Victor Soltwisch	Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction	Proc. SPIE, Vol.11057, p. 110570M, 2019	BibTeX DOI arXiv
Felix Binkowski, Lin Zschiedrich, Martin Hammerschmidt, Sven Burger	Modal analysis for nanoplasmonics with nonlocal material properties	Phys. Rev. B, Vol.100, p. 155406, 2019	BibTeX DOI arXiv
Theresa Höhne, Peter Schnauber, Sven Rodt, Stephan Reitzenstein, Sven Burger	Numerical Investigation of Integrated Single-Photon Emitters in Low-Index-Contrast Waveguides	Nanophotonics: Foundations & Applications, CSF Conference Book of Abstracts, Lukas Novotny, Romain Quidant (Eds.), p. B11, 2019	BibTeX
Theresa Höhne, Peter Schnauber, Sven Rodt, Stephan Reitzenstein, Sven Burger	Numerical Investigation of Light Emission from Quantum Dots Embedded into On-Chip, Low Index Contrast Optical Waveguides	Phys. Status Solidi B, Vol.256, p. 1800437, 2019	BibTeX DOI arXiv
Sven Burger, Philipp-Immanuel Schneider, Theresa Höhne, Lin Zschiedrich	Numerical methods for simulation and optimization of the extraction efficiency from quantum-dot based single-photon emitters	7th International Workshop on Engineering of Quantum Emitter Properties (EQEP), Stephan Reitzenstein, Tobias Heindel (Eds.), p. 20, 2019	BibTeX
Felix Binkowski, Lin Zschiedrich, Philipp-Immanuel Schneider, Martin Hammerschmidt, Xavier Garcia Santiago, Fridtjof Betz, Sven Burger	Spectral Expansion of the Scattering Response of Resonant Nanostructures	EOS Topical Meeting on Diffractive Optics, Kimmo Saastamoinen (Ed.), p. 1, 2019, ISBN: 978-952-68553-8-7	BibTeX
Philipp-Immanuel Schneider, Martin Hammerschmidt, Lin Zschiedrich, Sven Burger	Using Gaussian process regression for efficient parameter reconstruction	Proc. SPIE, Vol.10959, p. 1095911, 2019	BibTeX DOI arXiv
2018
Philipp Gutsche, Manuel Nieto-Vesperinas	Optical Chirality of Time-Harmonic Wavefields for Classification of Scatterers	Sci. Rep., Vol.8, p. 9416, 2018	BibTeX DOI arXiv