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Home Research Optical Metrology Beyond Resolution Limits (BeCOMe)

Light-matter interplay for optical metrology beyond the classical spatial resolution limits

The EU aims at holding a dominant global position in nanotechnology, micro-nanoelectronics, photonics and advanced materials: four of the six Key Enabling Technologies (KET) identified by the European Commission. Such dominnat position strongly depends on the availability of proper tools that can serve the metrology needs of those KETs in terms of speed, non-invasiveness, reliability and integrability. This project is a part of the collaborative Joint Research Project (JRP) BeCOMe. This JRP explores novel metrology paradigms exploiting light-matter interplay, the topological information encoded in optical fields and the most recent accomplishments in the areas of quantum optics and inverse problems to achieve disruptive advances in optical metrology.

Partners: 

  • VSL B.V. (NL)
  • Cesky Metrologicky Institut (CZ)
  • Dansk Fundamental Metrologi A/S (DK)
  • Istituto Nazionale di Ricerca Metrologica (IT)
  • National Physics Laboratory (UK)
  • Physikalisch-Technische Bundesanstalt (DE)
  • Aalto-korkeakoulusäätiö sr (FI)
  • Friedrich-Schiller-Universität Jena (DE)
  • Fundacio Institut de Ciencies Fotoniques (ES)
  • Technische Universität Braunschweig (DE)
  • Technische Universiteit Delft (NL)
  • Università degli Studi di Torino (IT)
  • Swansea University (UK)
  • Zuse Institute Berlin (DE)
  • Danmarks Tekniske Universitet (DK)

 

EMPIR Funding Logo

Optical metrology beyond resolution limits (BeCOMe)
Group
Computational Nano Optics
Heads
Burger, Dr. Sven
Partners
VSL B.V. (NL)
Related features
Design of Nanophotonic Devices
Funding
EMPIR
Links
BeCOMe project homepage

Publications

2023
Nanostructures for in-situ surface-enhanced Kretschmann-Raether ellipsometry Proc. SPIE, p. 124280S, Vol.12428, 2023 Deshabrato Mukherjee, Benjámin Kalas, Sven Burger, György Sáfrán, Miklós Serényi, Miklós Fried, Péter Petrik BibTeX
DOI
arXiv
2020
Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers Opt. Express, Vol.28, p. 23122, 2020 Thomas Siefke, Carol Hurtado, Johannes Dickmann, Walter Dickmann, Tim Käseberg, Jan Meyer, Sven Burger, Uwe Zeitner, Bernd Bodermann, Stefanie Kroker BibTeX
DOI
Quasinormal mode expansion of optical far-field quantities Phys. Rev. B, Vol.102, p. 035432, 2020 Felix Binkowski, Fridtjof Betz, Rémi Colom, Martin Hammerschmidt, Lin Zschiedrich, Sven Burger BibTeX
arXiv
DOI
2019
An auxiliary field approach for computing optical resonances in dispersive media J. Eur. Opt. Soc.-Rapid, Vol.15, p. 3, 2019 Felix Binkowski, Lin Zschiedrich, Sven Burger BibTeX
DOI
Benchmarking five global optimization approaches for nano-optical shape optimization and parameter reconstruction ACS Photonics, Vol.6, p. 2726, 2019 Philipp-Immanuel Schneider, Xavier Garcia Santiago, Victor Soltwisch, Martin Hammerschmidt, Sven Burger, Carsten Rockstuhl BibTeX
DOI
arXiv
Computing resonances in nano-photonic devices using Riesz-projection-based methods The 10th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META 2019), Said Zhoudi, Antonio Topa (Eds.), p. 92, 2019 Sven Burger, Felix Binkowski, Lin Zschiedrich BibTeX
Correlation of circular differential optical absorption with geometric chirality in plasmonic meta-atoms Opt. Express, Vol.27, p. 5097, 2019 Jon Wilson, Philipp Gutsche, Sven Herrmann, Sven Burger, Kevin McPeak BibTeX
DOI
Decomposition of scattered electromagnetic fields into vector spherical wave functions on surfaces with general shapes Phys. Rev. B, Vol.99, p. 045406, 2019 Xavier Garcia Santiago, Martin Hammerschmidt, Sven Burger, Carsten Rockstuhl, Ivan Fernandez-Corbaton, Lin Zschiedrich BibTeX
DOI
arXiv
Efficient global sensitivity analysis for silicon line gratings using polynomial chaos Proc. SPIE, Vol.11057, p. 110570J, 2019 Nando Farchmin, Martin Hammerschmidt, Philipp-Immanuel Schneider, Matthias Wurm, Markus Bär, Sebastian Heidenreich BibTeX
DOI
Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction Proc. SPIE, Vol.11057, p. 110570M, 2019 Anna Andrle, Philipp Hönicke, Philipp-Immanuel Schneider, Yves Kayser, Martin Hammerschmidt, Sven Burger, Frank Scholze, Burkhard Beckhoff, Victor Soltwisch BibTeX
DOI
arXiv
Modal analysis for nanoplasmonics with nonlocal material properties Phys. Rev. B, Vol.100, p. 155406, 2019 Felix Binkowski, Lin Zschiedrich, Martin Hammerschmidt, Sven Burger BibTeX
DOI
arXiv
Numerical Investigation of Integrated Single-Photon Emitters in Low-Index-Contrast Waveguides Nanophotonics: Foundations & Applications, CSF Conference Book of Abstracts, Lukas Novotny, Romain Quidant (Eds.), p. B11, 2019 Theresa Höhne, Peter Schnauber, Sven Rodt, Stephan Reitzenstein, Sven Burger BibTeX
Numerical Investigation of Light Emission from Quantum Dots Embedded into On-Chip, Low Index Contrast Optical Waveguides Phys. Status Solidi B, Vol.256, p. 1800437, 2019 Theresa Höhne, Peter Schnauber, Sven Rodt, Stephan Reitzenstein, Sven Burger BibTeX
DOI
arXiv
Numerical methods for simulation and optimization of the extraction efficiency from quantum-dot based single-photon emitters 7th International Workshop on Engineering of Quantum Emitter Properties (EQEP), Stephan Reitzenstein, Tobias Heindel (Eds.), p. 20, 2019 Sven Burger, Philipp-Immanuel Schneider, Theresa Höhne, Lin Zschiedrich BibTeX
Spectral Expansion of the Scattering Response of Resonant Nanostructures EOS Topical Meeting on Diffractive Optics, Kimmo Saastamoinen (Ed.), p. 1, 2019, ISBN: 978-952-68553-8-7 Felix Binkowski, Lin Zschiedrich, Philipp-Immanuel Schneider, Martin Hammerschmidt, Xavier Garcia Santiago, Fridtjof Betz, Sven Burger BibTeX
Using Gaussian process regression for efficient parameter reconstruction Proc. SPIE, Vol.10959, p. 1095911, 2019 Philipp-Immanuel Schneider, Martin Hammerschmidt, Lin Zschiedrich, Sven Burger BibTeX
DOI
arXiv
2018
Optical Chirality of Time-Harmonic Wavefields for Classification of Scatterers Sci. Rep., Vol.8, p. 9416, 2018 Philipp Gutsche, Manuel Nieto-Vesperinas BibTeX
DOI
arXiv